FOEM|Processing facilities

Atomic layer deposition	Chemical vapor deposition system
CO2 snow cleaner	Damp-heat test system
E-beam system-1	Glovebox
Laser scribing system	Multi-source high vacuum evaporator system
NIR annealing system	O2 plasma
Photolithography system	Purification system
Roll-to-roll slot-die coating	Screen printing system
Sheet-to-sheet slot-dia coating	Spin coating system
Sputter system	Sputter system
Thermal evaporator	Xeon lamp annealing machine

Atomic layer deposition