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Frontier Optoelectronic Materials Lab.
前瞻光電材料實驗室
Processing facilities
 Atomic layer deposition |  Chemical vapor deposition system |
|---|---|
 CO2 snow cleaner |  Damp-heat test system |
 E-beam system-1 |  Glovebox |
 Laser scribing system |  Multi-source high vacuum evaporator system |
 NIR annealing system |  O2 plasma |
 Photolithography system |  Purification system |
 Roll-to-roll slot-die coating |  Screen printing system |
 Sheet-to-sheet slot-dia coating |  Spin coating system |
 Sputter system |  Sputter system |
 Thermal evaporator |  Xeon lamp annealing machine |
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